Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition
نویسندگان
چکیده
منابع مشابه
Microwave Plasma Assisted Chemical Vapor Deposition of Diamond
Diamond crystal S and p01 ycrystal l i ne diamond fi lms have been depos i e y t h e microwave plasma ass i s t ed C V D method from C H / H mixtures. The i n: :oncentration of methane, the pressure, the temperatu$e, 'the to ta l flow ra t e and the microwave power were varied in large ranges. The morphology of the deposits were s tudied by op t i ca l and scanning e l ec t ron microscopy and t...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2015
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4934751